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Russia Says It's Assembled a Lithography Machine, Will Make 350nm Chips Soon
(www.extremetech.com)
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I think this youtuber might have achieved similar nm with his DIY setup, but I don't remember. He's using a different process though.
breaking taps is very impressive, but sam zeloof made it quite a bit further, he made his own packaged IC. now he runs a startup called atomic semi, that is trying to use electron beam lithography for prototyping.